Active Magnetic MNEMS Overview - AZoNano.com

Submitted by Anonymous (not verified) on Sun, 02/19/2012 - 20:14

AZoNano.comActive Magnetic MNEMS OverviewAZoNano.comThe actuator consists of parylene diaphragms, spiral copper coils, and permanent magnets. Another example of a micropump is a microsystem developed by the Hsinchu University in Taiwan intended for pneumatic applications. It features an elastomer ...